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Автор: Nuri Emanetoglu and Yicheng Lu
Год: 2011
Издание:
LAP Lambert Academic Publishing
Страниц: 160
ISBN: 9783846529881
Surface acoustic wave (SAW) devices are widely used for communications and sensor applications. Making SAW devices tunable would make them more flexible and expand their applications. In this work, a novel monolithically integrated tunable SAW (MITSAW) device is proposed, designed and analyzed. The device consists of zinc oxide (ZnO) and magnesium zinc oxide ((Mg,Zn)O) multilayer structures grown on sapphire substrates, and utilizes their piezoelectric and semiconducting properties. It is shown that (Mg,Zn)O is piezoelectric for Mg mole concentrations less than 35%, where the compound has the wurtzite crystal structure. For piezoelectric (Mg,Zn)O, the acoustic velocities increase and piezoelectric coupling coefficients decrease as the Mg composition increases. In the MITSAW device, the SAW velocity can be tuned using the interaction between electrons at the (Mg,Zn)O / ZnO interface and the electric fields accompanying the propagating SAW. A large tunability range with high acoustic...
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