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Handbook of plasma processing technology. Fundamentals, etching, deposition, and surface interaction
Автор: Rossnagel S.M., Cuomo J.J., Westwood W.D.
Год: 1990
Издание: [не указано]
Страниц: [не указано]
ISBN: [не указан]
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Добавлено: 2009-08-09 01:26:37

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